Phase-Change Material RF Switches and Monolithic Integration in CMOS Processes

An overview of the PCM RF switch technology at Tower Semiconductor will be presented. Different integrations with their advantages and disadvantages for different product applications will be discussed. Challenges in relation to market adoption will also be discussed with both released and in-development solutions, including power handling, energy consumption, digital actuation, and cycling endurance. Finally, a future road map in terms of integration with 300mm processes and unit device goals will also be presented.