Switches Based on Phase-Change-Material From DC to 200GHz

This presentation demonstrates a low Ron*Coff (<12fs) PCM RFS on N16 and N40 platform with enhanced phase change material (PCMe) on low-cost bulk substrate. The switch maintains stable Ron over 100Mc at -40°C to 125°C, with the underlying transistor unaffected. The device is further utilized in an SPDT design and optimized into a compact structure, enabling reduced switching power, smaller area, and simplified design complexity. The proposed 3-bit true-time-delay phase shifter has embedded the SPDT for wide bandwidth, low amplitude error (<1.03dB), and group delay (<1.28ps).