Integrated Optical Activation of Phase Change Material (PCM) RF Switches

In this talk, we will present a breakthrough optical actuation method that leverages the optical absorption properties of PCMs at infrared wavelengths. By using a 915nm pulsed laser source and SiN waveguides integrated within the device stack for activation, we eliminate the need for metallic heaters. This significantly increases the cutoff frequency, enabling device operation in the sub-THz range. Furthermore, optical actuation enables new opportunities for THz reconfigurable array antennas, where PCM switches control the characteristics of each radiating element without the limitations of metallic polarization lines. The presentation will also highlight recent advances in the monolithic integration of this technology within a CMOS back-end-of-line.