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RF Acoustic Wave Resonators, Getting Started
Radio frequency (RF) surface acoustic wave (SAW) resonators are paid much attention also for the use in scientific research such as qbit and spin control in addition to consumer applications. Only one metal layer is necessary for the interdigital electrodes, and high-quality piezoelectric wafers are commercially available with low price. Thus, test devices seem to be producible easily with the help of 2D FEM analysis. However, measured results are commonly much worse than the simulation. This is also true for RF bulk acoustic wave (BAW) resonators even if complexity in fabrication steps is considered. This talk overviews operation of RF acoustic wave resonators. Simple FEM analysis is efficient for initial design and estimation of ideal resonator performances. However, many factors degrade real device performances, and excellent ones are achievable only when everything is good. In other words, many pitfalls are waiting for novices. Representative ones and their countermeasures (if exist) are introduced, and their impact to device performances is explained with the help of LCR modelling.