A DC-40GHz Grounded Coplanar Waveguide SP4T RF MEMS Switch in Hermetic Package

This paper presents a hermetically packaged SP4T RF MEMS switch operating from DC to 40 GHz, designed with a grounded coplanar waveguide (CPWG) structure. Fabricated on an 8-inch fused silica wafer and sealed with a fused silica cap, the switch supports DC–50 GHz operation. It achieves less than 1 dB insertion loss up to 40 GHz, with better than 15 dB return loss and 20 dB isolation.