A Dual-Band Micromachined On-Wafer Probe with Integrated Diplexer for Ultra-Broadband Measurements to 220GHz

This work presents a micromachined dual-band probe for ultra-broadband single-sweep measurements to 220 GHz. The probe features both WR-5.1 waveguide and 1.0 mm coaxial inputs that are combined in an integrated passive diplexer. The probe shows a maximum loss in the crossover region of 6–7 dB and a minimum output return loss of 10 dB.