Improve RF Dual Probe Calibration Accuracy with Peer-Terminated Standards

The paper describes the theory and measurement results of a new type of calibration standard structure call peer-terminated standards for RF dual probe on-wafer calibration. For conventional dual standards, in-probe crosstalk will lead to inconsistent error-boxes, results in calibration error. The paper demonstrated that peer-terminated standards ensure the consistency of probe error-boxes during calibration, therefore improving the calibration accuracy.