On-wafer calibrations and material measurements

Material properties are essential model inputs and design constraints when designing new or improved devices. NIST uses a suite of tools for measuring the broadband electrical properties of a wide range of materials including low-loss dielectrics, non-linear dielectrics, tunable materials, and compositional spreads. This talk reviews the on-wafer techniques we use for materials metrology, and discusses some trade-offs between different techniques with a detailed summary of our on-wafer calibration and measurement process including fabrication procedures and design considerations. Finally, a discussion of our new standardization efforts to improve the on-wafer calibration kits and techniques available to industry is presented.