Transferring on-wafer traceability to industrial lumped-element calibrations

Currently, on-wafer traceability is directly linked to Multiline TRL, which is widely recognized as one of the most accurate on-wafer calibrations. In industrial applications, however, fixed-distance calibrations such as SOLT, LRM, etc. using commercial impedance standard substrates (ISS) are usually preferred. In this talk, we will show how the traceable uncertainties are obtained for reference multiline TRL calibrations, and how these can be transferred to industrial calibrations as mentioned above. Key is the proper characterization of lumped-element standards on the ISS with custom-made, application-specific reference calibration standards.