Approaches to carry out well-documented measurements for active devices using varying calibration methodologies

One area of recent interest has been the study of sensitive figures of merit for active devices with a variety of calibration approaches. In our study, approaches were developed to perform calibrations using different algorithms over multiple calibration substrates in a single measurement run before and after the measurement session of active devices. These calibrations were used for post-process correction and automatically de-embed the active devices. This talk outlines the acquisition approach used, including the integration of the Velox software used for probe station control and WinCal used for data acquisition, with Python packages for data analytics, post-processing, and visualization.