Temperature Compensated Magnetostatic Wave Resonator Microsystem
This work reports a compact temperature compensating permanent magnet assembly to provide static bias for micro-machined distributed magnetostatic forward volume wave (MSFVW) resonators. The assembly is only 8.2mm×8.2mm×6.3mm, and can provide strong enough static magnetic field to bias MSFVW resonators to a resonant frequency of 19.65GHz. Compensated by the bias assembly, the resonator exhibits a TCF of -26.81ppm/K while uncompensated TCF is +359ppm/K. In addition, the temperature compensation does not cause resonator performance degradation, and the resonator exhibits a quality factor of 1050 and a coupling coefficient of 4% at room temperature.