Implementation of SIW Cavity in Commercial CMOS Technology for Sub-Terahertz Band Applications

For sub-terahertz band applications, two compact and low-loss on-chip substrate integrated waveguide (SIW) cavities are designed in CMOS technology. Compact size cavity is achieved by utilizing the folded ridge structure in the quarter mode SIW (QMSIW) structure which is loaded with complementary split-ring resonators (CSRRs). Two prototypes of the proposed QMSIW cavities with and without CSRR are fabricated in 1P6M CMOS technology. From the measurement, both cavities present return losses higher than 27 dB and external Q-factors higher than 140. The proposed work shows that even at such high frequencies, compact and low-loss SIWs can be fabricated in commercial CMOS technology and opens a window to utilizing such cavities for other low-loss components such as oscillators, on-chip bandpass filters and on-chip antennas for sub-terahertz band applications.