Antenna-Coupled Terahertz Detectors in 16nm FinFET

This paper presents an on-chip antenna-coupled terahertz (THz) power detector implemented in a 16nm FinFET technology. The detector takes advantage of the transistor nonlinearity to output a rectified DC signal proportional to the input THz signal power. Both a dipole and a folded dipole antenna are designed on-chip to characterize the detectors from 170–700GHz. The detectors achieve a maximum responsivity of 88.8kV/W and NEP 8.7pW/√Hz at 554GHz for the dipole-coupled detector and 41.7kV/W and 18.4pW/√Hz at 502GHz for the folded-dipole-coupled detector.