A THz Attenuator Based on Voltage-tunable Whispering Gallery Mode Resonator

On-chip terahertz (THz) attenuator plays an important role in the accurate control and processing of terahertz signals. Here, this study demonstrates a voltage-driven thermal tunable terahertz attenuator based on whispering gallery mode resonator in a standard waveguide compatible package on the silicon platform. The attenuator has an insertion loss of 5.5 dB and exhibits an attenuation range of 6.5 to 12.8 dB at 390.00 GHz. Compact and compatible with standard waveguide package attenuator is conducive to integrate other functions. It opens up opportunities for integrated terahertz devices and systems, such as terahertz modulators and terahertz nonlinear devices.