Edge Coupled DC-60GHz Different SPDT MEMS Switch for High-Speed Digital Applications

This paper introduces an edge-coupled differential SPDT MEMS switch for high-speed digital applications over 100Gbps. Built on an 8-inch fused silica wafer and hermetically sealed with a fused silica cap, it supports DC-60GHz operation. The ohmic contact switch design achieves <1dB differential insertion loss up to 60GHz, with >15dB differential return loss and 20dB differential isolation.