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Guidelines for the Design of Calibration Substrates, Including the Suppression of Parasitic Modes, Influence of Microwave Probes and Crosstalk Effects
On-wafer measurements are known to be challenging and ambitious, involving several parasitic effects which degrade the accuracy of the measurements. This talk further elaborates on parasitic effects caused by multimode propagation, the non-idealities of microwave probes, and crosstalk between adjacent structures, for example. The impact of each effect is discussed, along with measures to mitigate them as much as possible.