TUMA7: 5G Filters for Semiconductor Device Test Bench

Abstract
RF filters isolate desired frequencies, suppress interference, and create quiet testing environments for semiconductor devices. This paper describes low-pass, high-pass, band-pass, and band-stop filter solutions for accurate measurement of a semiconductor Device Under Test (DUT) for 5G frequency with special emphasis including extending high pass frequency to 20GHz, maintaining high isolation of 60~100dB between bands, sharp roll off at the band edge, and low PIM (passive Intermodulation). Future work will present tunable filters and switch filter banks to dynamically change the passband for multi-band devices or specific test cases.